OAI (Optical Associates, Inc.)

The Model 6012, an automated 300mm mask aligner, is part of OAI's elite class of production photolithography equipment that is engineered with OAI's proven modular platform, better than 3% uniformity, and a thruput of 200 wafers per hour in 1st mask mode.  It has all the features of OAI"s  Model 6000 for production but is engineered for 300mm or 12". It is a flexible, affordable, and versatile  tool that can handle 4" to 12 ". Please visit OAI at booth 1151 to discuss this product and learn about OAI's other products.

The Model 212 is a high preformance large area mask aligner that offers an economic alternative for R&D for 300mm substrates and has all the features of OAI's Model 200 table top Mask Aligner. It is  used for large area substrates, LCD, panel level packaging, thin film and OLED. Using the innovative chuck leveling system it has precision alignment and uniform contact. The system has 1 micron resolution and alignment. The model 212 has OAI's proven collimated UV/LED Light Source and constant intensity controller which provides exposure intensity within 2%.  Please visit us at Booth 1151 South Hall to further discuss your requirements with our technical staff.